Optimization of a Suspension of a Micromechanical Accelerometer in an Angular Velocity Measurement Unit

Abstract Optimization of the suspension micromechanical accelerometer, which is a part an angular velocity measurement unit, was considered. This problem faced because need to improve design existing device meet new technical requirements. Shock loads up 1 000 g exceed ultimate for accelerometers by several orders magnitude. During study, it turned out that unit shell works as resonator, so shock on accelerometer can even 000g. In this case, suspensions are deformed in plane causes their destruction. The solution hampered strict limits overall dimensions device. dampers could absorb such simply did not fit into attachment points. Therefore, original spring designed and manufactured purpose. At final stage, additional system passive heat outlets from installed.